JPS6194741U - - Google Patents

Info

Publication number
JPS6194741U
JPS6194741U JP17989784U JP17989784U JPS6194741U JP S6194741 U JPS6194741 U JP S6194741U JP 17989784 U JP17989784 U JP 17989784U JP 17989784 U JP17989784 U JP 17989784U JP S6194741 U JPS6194741 U JP S6194741U
Authority
JP
Japan
Prior art keywords
pressure
space
sensitive element
case
outside
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17989784U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17989784U priority Critical patent/JPS6194741U/ja
Publication of JPS6194741U publication Critical patent/JPS6194741U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP17989784U 1984-11-27 1984-11-27 Pending JPS6194741U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17989784U JPS6194741U (en]) 1984-11-27 1984-11-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17989784U JPS6194741U (en]) 1984-11-27 1984-11-27

Publications (1)

Publication Number Publication Date
JPS6194741U true JPS6194741U (en]) 1986-06-18

Family

ID=30737461

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17989784U Pending JPS6194741U (en]) 1984-11-27 1984-11-27

Country Status (1)

Country Link
JP (1) JPS6194741U (en])

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5062077A (en]) * 1973-10-01 1975-05-27
JPS528878A (en) * 1975-07-11 1977-01-24 Hitachi Ltd Semiconductor negative pressure sensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5062077A (en]) * 1973-10-01 1975-05-27
JPS528878A (en) * 1975-07-11 1977-01-24 Hitachi Ltd Semiconductor negative pressure sensor

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